Filter and device including the same

ABSTRACT

A filter and a device including the filter may include a filter and a plurality of pores arranged two-dimensionally on the filter. The plurality of pores may include a plurality of first pores having a longer structure in a certain direction and a plurality of second pores having a longer structure in a direction different from that of the first pore. The first and second pores may have a two-dimensional arrangement in order to suppress or prevent the occurrence of cracks in the filter due to stress.

TECHNICAL FIELD

The present disclosure relates to a filter and a device including thefilter.

BACKGROUND ART

Various devices and methods may be utilized for filtering biomaterials.Especially, research has been performed on devices to separateleukocytes from remaining globule cells in the blood. The separatedleukocytes may be used in various treatment processes including anautologous cytotherapy. Conventional leukocyte separation methods neededfor a cell therapy, etc. have difficulties in separating leukocytes fastfrom the blood, which has a volume of more than or equal to about 10 ml.

For example, a chemical red blood cell lysis, which is a method usingcharacteristic differences of cell membranes, may selectively separatered blood cells via a neutral solution (PH 7). However, leukocytes maybe contaminated by remains of dissolved red blood cells. A density-basedseparation method may be used to separate a red blood cell layer and aleukocyte layer via a density difference by using a solution having acertain density such as Ficoll-Paque. However, this method is timeconsuming and requires a high competency level of the personnel usingit. A track-etched membrane filter may have a non-uniform distributionof pores and a low pore density, and thus, may not be suitable for massseparation of red blood cells.

DISCLOSURE Technical Problem

Provided is a filter with good filtering properties and a deviceincluding the same. The filter may prevent the occurrence of crackstherein while maintaining a relatively fast filtering speed.

Technical Solution

According to an aspect of an embodiment, the filter may include aplurality of pores two-dimensionally arranged, and may be configured tofilter a biomaterial via the plurality of pores.

The plurality of pores may include a plurality of first pores extendingin a first direction and having a relatively longish structure in thefirst direction than in a direction perpendicular to the firstdirection; and a plurality of second pores having a relatively longishstructure in a second direction different from the first direction, inwhich an end portion along a major axis direction of the second pore mayface a central portion of a longer side of the first pore.

Advantageous Effects

A filter and a device including the same according to the presentdisclosure may have an arrangement shape of pores capable of preventingan extension of cracks and also may have a high filtering speed due to ahigh density of pores.

In addition, the filter and the device including the same according tothe present disclosure may be implemented to have high reproducibilityirrespective of skill of a measurer. In addition, the filter and thedevice including the same according to the present disclosure mayprevent damage on cells.

In addition, since a general semiconductor process can be utilized inmanufacturing the filter, the manufacturing of the filter may be easyand a cost thereof may be reduced.

DESCRIPTION OF DRAWINGS

FIG. 1 is a perspective view of a filter according to an embodiment.

FIG. 2 is a plan view of a first pore.

FIG. 3 is a plan view of a second pore.

FIG. 4 is a diagram illustrating a red blood cell and kinds and sizes ofa leukocyte.

FIG. 5 is a diagram illustrating various shapes of pores.

FIG. 6 is a plan view of a filter according to a first comparativeembodiment.

FIG. 7 is a diagram illustrating a stress simulation result with regardto the filter of FIG. 6.

FIG. 8 is a plan view of a filter according to a second comparativeembodiment.

FIG. 9 is a diagram illustrating a stress simulation result with regardto the filter of FIG. 8.

FIG. 10 is a plan view of a filer according to an embodiment.

FIG. 11 is a diagram illustrating a stress stimulation result withregard to the filter of FIG. 10.

FIG. 12 is a plan view of a filer according to an embodiment.

FIG. 13 is a diagram illustrating a stress simulation result with regardto the filter of FIG. 12.

FIG. 14 is a plan view of a filter according to another embodiment.

FIG. 15 is a diagram illustrating a stress simulation result with regardto the filter of FIG. 14.

FIG. 16 is a plan view of a filter according to another embodiment.

FIG. 17 is a diagram illustrating a stress simulation result with regardto the filter of FIG. 16.

FIG. 18 is a plan view of a filter according to another embodiment.

FIGS. 19A and 19B are diagrams illustrating a filter structure accordingto an embodiment.

FIG. 20 is a photo of a device including a filter according to anembodiment described above.

BEST MODE

According to an aspect of an embodiment, the filter may include aplurality of pores two-dimensionally arranged, and may be configured tofilter a biomaterial via the plurality of pores.

The plurality of pores may include a plurality of first pores extendingin a first direction and having a relatively longish structure in thefirst direction than in a direction perpendicular to the firstdirection; and a plurality of second pores having a relatively longishstructure in a second direction different from the first direction, inwhich an end portion along a major axis direction of the second pore mayface a central portion of a longer side of the first pore.

The first and second pores may be alternately arranged, respectively inthe first and second directions.

The end portion along the major axis direction of the first pore mayface the central portion of the longer side of the second pore or anarea adjacent thereto.

A pair of first pores may be respectively arranged on one side and theother side along the first direction of the second pore, and a pair offirst pores may be respectively arranged on one side and the other sidealong the second direction of the second pore.

Each one of first pores may be arranged on the one side and the otherside along the first direction of the second pore, and a center line inthe major axis direction of the first pore on the one side and thecenter line in the major axis direction of the first pore on the otherside may be separated from each other in the second direction.

The plurality of pores may further include a plurality of third poresbetween the plurality of first pores and the plurality of second pores.

The third pore may have same lengths in the first and second directions.

The plurality of pores may have uniform gaps in the first and seconddirections.

The first and second pores may have elliptical shapes.

The first and second pores may respectively have a ratio of a length inthe major axis direction over that in the minor axis direction as morethan or equal to about 2.5.

The first and second pores may respectively have the length in the majoraxis of about 10 μm to about 20 μm, and that in the minor axis directionof about 4 μm to about 7 μm.

A shortest distance between the first pore and the second pore may beabout 4 μm to about 7 μm.

The area ratio which the plurality of pores occupy on a filter area withthe plurality of pores distributed thereon may be more than or equal toabout 30%.

The filter may have a plate structure.

The filter may include a semiconductor material.

The filter may include a rigid material including inorganic substance.

The biomaterial may include the blood, and the first and second poresmay be configured to allow a red blood cell of the blood to passtherethrough but not to allow a white blood cell to pass therethrough.

A support member may be arranged on a bottom surface of the filter tosupport it and may include at least one of openings which expose thebottom surface of the filter.

According to another aspect of an embodiment, a filter may include aplurality of pores that are two-dimensionally arranged and may beconfigured to filter the biomaterial by using the plurality of pores, inwhich the plurality of pores include: a plurality of first poresextending in a first direction and having a relatively longish structurein the first direction than in a direction perpendicular to the firstdirection; and a plurality of second pores having a relatively longishstructure in a second direction different from the first direction, inwhich the first and second pores may be alternately arranged,respectively in the first and second directions.

An end portion along a major axis direction of the first pore may face acentral portion of a longer side of the second pore.

The end portion along the major axis direction of the second pore mayface the central portion of the longer side of the first pore.

According to another aspect of an embodiment, a device may include afilter according to descriptions above; an injection unit injecting thebiomaterial into the filter; and a storing unit storing the biomaterialwhich has passed through the filter.

MODE FOR INVENTION

A filter and a device including the same will be described in detailbelow with reference to the appended diagrams. Layers, widths, andthickness of regions illustrated in the diagrams may be exaggerated forclarity and convenience of explanation. Throughout the description, likereference numerals denote like components.

Although general terms that are currently widely used are selected asthe terms used in the present disclosure while considering functions ofthe components in the embodiments, selection of the terms may varydepending on the intention of those skilled in the art, judicialprecedents, emergence of new technology, etc. In addition, in certaincases, there may be terms arbitrarily chosen by the applicant and themeanings of the terms shall be stated in detail in the descriptions ofthe corresponding embodiments. Therefore, the terms used in anembodiment should be defined based, not on the names of a simple term,but on the meaning of the terms and the contents throughout theembodiment.

Throughout the specification, when a portion “includes” an element,another element may be further included in the portion, rather thanexcluding the existence of the other element, unless otherwisedescribed.

FIG. 1 is a perspective view of a filter 100 according to an embodiment.FIG. 2 is a plan view of a first pore 120. FIG. 3 is a plan view of asecond pore 130. FIG. 4 is a diagram illustrating a red blood cell andkinds and sizes of a leukocyte. FIG. 5 is a diagram illustrating variousshapes of pores.

Referring to FIG. 1, the filter 100 may include a plurality of pores 120and 130 arranged two-dimensionally and may be configured to filter abiomaterial via the plurality of pores 120 and 130.

The filter 100 may have a plate structure and may include asemiconductor material. For example, the filter 100 may include asemiconductor material including group 4 elements such as silicon (Si).When the filter 100 is manufactured from a semiconductor material, pores120 and 130 may be formed by a conventional semiconductor process. Forexample, the pores 120 and 130 of the filter 100 may be formed by usinga photo lithography process. In this case, the filter 10 may berelatively inexpensive and suitable for mass production.

The semiconductor material used in the semiconductor process is abrittle material having a very low elasticity, and thus, a crack mayeasily occur in the filter 100. The crack generated by a brittlefracture may propagate to an area adjacent to the filter 100. Accordingto an embodiment, propagation of a crack in the filter 100 due to abrittle fracture may be prevented by an array of the pores 120 and 130.

Table 1 illustrates general values of Young's modulus and fracturetoughness of several materials including monocrystalline silicon, whichis widely used in an electronic phototype process, etc.

TABLE 1 Young's modulus Fracture toughness Material [GPa] [MPa ·m^(1/2)] Monocrystalline silicon 131 0.83~0.95 Diamond 1000 3.4 Concrete400 0.2~1.4 Steel 200  50~100 Glass 65 0.7~0.8 Nylon 5 2.5~3.0Polystyrene (PS) 2.28~3.28 0.7~1.1 Dentin 18.6 3.1 Smooth muscle0.000006 —

Referring to Table 1, the Young's modulus of silicon, which is used tomanufacture the filter 100, is 131 GPA. Silicon has little plasticdeformation to an external pressure and fracture toughness similar tothat of glass. Thus, when stress on the filter 100 exceeds a certainlimit, the surface of the filter 100, instead of being curved, may bebroken from the pores 120 and 130 which are physically most vulnerabledue to brittle destruction and from other boundary areas betweencomponents, and cracks may occur. The filter 100 may minimize damage infiltering capacity thereof via an array of the pores 120 and 130according to an embodiment.

When the filter 100 is thin, the filtering performance may be improved.When the filter 100 is too thick, particles may not pass therethroughand remain stuck in the pores 120 and 130. Since an aspect ratio affectsmanufacturing of a semiconductor structure in a photo lithographyprocess, when lengths of the pores 120 and 130 are several microns, anoverall thickness of the filter 100 may be limited to a level of dozensof microns in order to perform a fine process. However, the overallthickness is not necessarily limited thereto. For example, the thicknessof the filter 100 may be several times greater than the length in theminor axis direction of the pores 120 and 130. For example, thethickness of the filter 100 may be greater than several microns ordozens of microns. As an example, the thickness of the filter 100 may beapproximately about 50 μm.

The pores 120 and 130 may include a plurality of first pores 120 and aplurality of second pores 130. The pores 120 and 130 may denote holeswhich are two-dimensionally arranged on the filter 100. Across-sectional shape and a length component of the pores 120 and 130may be determining factors of whether particles may pass therethrough.Referring to FIG. 1, among particles 1 through 7, only particles 1 and2, which have smaller cross-sections than the pores 120 and 130, maypass through the filter 100 and other particles 3 through 7 may not passthrough the filter 100.

Referring to FIG. 2, the first pore 120 may be a pore having arelatively longish shape along a first direction. The first pore 120 mayhave the length of the major axis along the first direction larger thanthat of the minor axis in a direction perpendicular to the firstdirection. Such a shape of the first pore 120 may increase a ratio of anarea over the number thereof, and enhance filtering efficiency of thefilter 100. For example, a ratio of the length along the major axisdirection over that along the minor axis direction of the first pore 120may be more than or equal to about 2.5. A crossing point of the majoraxis and the minor axis of the first pore 120 may be a central point ofthe first pore 120. The central point may correspond to a center of mass(CM). Since the pore is a hollow hole with zero mass, the CM thereofpresupposes that the density of the pore is uniform.

Referring to FIG. 3, the second pore 130 may be a pore having arelatively longish shape along a second direction. The second pore 130may have the length of the major axis along the second direction largerthan that of the minor axis in a direction perpendicular to the seconddirection. For example, a ratio of the length along the major axisdirection over that along the minor axis direction of the second pore130 may be more than or equal to about 2.5.

The crossing point of the major axis and the minor axis of the secondpore 130 may be the CM of the second pore 130.

The first direction and the second direction may be different directionsfrom each other. For example, the first direction may have a certainangle from the second direction. For example, the first direction may beperpendicular to the second direction.

Due to a longish structure of the first and second pores 120 and 130, ahigh stress region and a low stress region, which are relativelydivided, may be formed on the filter 100. Descriptions will be providedfor the first pore 120 as an example for the sake of convenience anddescriptions below may be applicable to the second pore 130 also.

A stress region may denote an area on the filter 100 except pores towhich pressure is applied during a filtering process of particles orliquid. There is no stress region on the filter 100 when particles orliquid are not applied to the filter 100. During the filtering processof particles or liquid, pressure may be applied to the filter 100 via anaccumulation of particles or liquid thereon. The area on the filter 100to which pressure is applied may be defined as the stress region. Thestress region may be divided into the high stress region having a highlevel of stress and the low stress region having a low level of stress.The stress region may vary depending on not only an amount of particlesor liquid during the filtering process but also sizes and shapes of thepores arranged on the filter 100. For example, as the level of stress ofthe stress region increases, cracks may easily occur in thecorresponding stress region during the filtering process.

The stress region may be differently formed depending on the shape ofthe pore, and material and the thickness of the filter 100. For example,when the pore arranged on the filter 100 is isotropic or circular, thestress region may be uniformly formed along the circumference of acircle. Isotropic pores may have uniform stress regions on the filter100 regardless of an arrangement shape of pores. However, a filter withisotropic pores arranged thereon may have a lower pore density than thatwith longish pores arranged thereon and thus, a filtering speed may berelatively low. The pore density is a ratio of an area of the pluralityof pores over the filter area with the plurality of pores distributedthereon.

The first pore 120 may have the high stress region in front of an endportion along the major axis direction thereof and have the low stressregion in front of a longer side along the minor axis direction thereof.Thus, a probability of crack formation in the high stress region of thefirst pore 120 may be relatively higher than that in the low stressregion on the filter 100 with the first pore 120 arranged thereon. Termsof the high stress region and the low stress region are used to comparea relative magnitude of stress and for the sake of convenience indescription.

Descriptions about the stress region above may be equally applicable tothe second pore 130 and duplicate content will be omitted.

The plurality of first pores 120 and the plurality of second pores 130may be arranged such that respective high stress regions are separatedfrom each other to the hilt and a maximum pore density is obtained. Forexample, the end portion along the major axis direction of the pluralityof second pores 130 may face the central portion of the longer side ofthe plurality of first pores 120. For example, the first and secondpores 120 and 130 may be alternately arranged, respectively in the firstdirection and the second direction.

With such an arrangement, the high stress region of the second pore 130may be separated from the high stress region of the first pore 120 tothe hilt. Accordingly, the filter 100 may have a relatively lowerprobability of crack formation. For example, even when an initial crackis formed on the filter 100, the possibility of crack propagation alongthe high stress region on the filter 100 may be low.

The filter 100 may be configured to filter biomaterial by using theplurality of pores. The biomaterial may denote various body fluids orsolution materials which exist inside animals, including human beings,and plants. For example, the biomaterial may include blood. Blood iscomposed of plasma, a liquid component, and various cells such as redblood cells, white blood cells, and platelets. For example, the filter100 may be used to filter white blood cells, which have a relativelylarger volume in the blood, red blood cells, or platelets. For example,a separate white blood cell may be utilized in an autologous cytotherapyand an induced pluripotent system cell (iPS). For example, separatewhite blood cells may be used in the autologous cytotherapy in which thewhite blood cells of a patient having a smaller number of white bloodcells in blood are selectively separated, reproduced via a cell divisionin in-vitro environment, and put back into the patient. In addition, forexample, cells including nuclei among separated cells such as whiteblood cells may be transformed to the iPS by using a difference betweena culture solution and the environment.

Referring to FIG. 4, average sizes of the red blood cell and the whiteblood cell existing in the human blood are illustrated. The red bloodcell has a long, elliptical shape and its length in the major axisdirection is about 5 μm to about 7 μm. The length in the minor axisdirection is shorter than that and is about 3 μm to about 5 μm. Theplatelet is smaller than the red blood cell and its diameter is about 3μm to about 5 μm. The white blood cell is largely divided into fivekinds. The white blood cell (leukocyte) is divided into a neutrophil, alymphocyte, a monocyte, an eosinophil, and a basophil. Each kind of thewhite blood cell has a somewhat different size, but most of white bloodcells have circular shapes and larger sizes than the red blood cell. Thewhite blood cell has an approximate diameter of about 7 μm to about 15μm and the lymphocyte, the smallest among white blood cell components,has a diameter of about 7 μm to about 10 μm.

The filter 100, which is to filter the white blood cell from the redblood cell and the platelet, and to concentrate the white blood cell,may have a pore size, for example, which may not let the lymphocyte passtherethrough but may let the red blood cell pass therethrough.

For example, the lengths in the minor axis direction of the pores 120and 130 may be approximately about 4 μm to about 7 μm. The lengths inthe minor axis direction of the pores 120 and 130 may be about 5 μm toabout 6 μm to enhance the filtering performance while preventing apossibility of partially distorted white blood cells from passingtherethrough.

For example, the length in the major axis direction of the pores 120 and130 may be approximately about 10 μm to about 20 μm. The length in themajor axis direction of the pores 120 and 130 may be approximately about17 μm to about 18 μm, to enhance the filtering performance whilepreventing a possibility that partially distorted white blood cells maypass therethrough.

For example, the shortest distance between the first pore 120 and thesecond pore 130 may be approximately about 4 μm to about 7 μm. Theshortest distance between the first pore 120 and the second pore 130 maybe approximately about 5 μm to about 6 μm to secure sufficientdurability to prevent cracks and to increase the pore density of thefirst and second pores 120 and 130.

The filter 100 may have a high area ratio of the plurality of pores overthe filter to sufficiently secure the filtering speed. For example, thearea ratio of the plurality of pores on the filter 100 with theplurality of pores distributed thereon may be more than or equal toabout 30%.

Referring to FIG. 5, the first and second pores 120 and 130 may havevarious shapes as long as their shapes are longish. For example, thefirst and second pores 120 and 130 may have elliptical shapes. Forexample, the first and second pores 120 and 130 may have across-sectional shape of a capsule. The elliptical shape may denote thecross-sectional shape of the capsule. For example, the first and secondpores 120 and 130 may have a hexagonal shape which is longish in onedirection.

FIG. 6 is a plan view of a filter according to a first comparativeembodiment. FIG. 7 is a diagram illustrating a stress simulation resultof the filter of FIG. 6.

Referring to FIGS. 6 and 7, the filter according to the firstcomparative embodiment may have the plurality of pores arranged suchthat high stress regions are close to each other on the filter. Forexample, the filter according to this embodiment has the plurality ofpores arranged such that major axes are in parallel with each otheralong the first direction. In addition, the filter according to thisembodiment may have the plurality of pores arranged in parallel witheach other along the second direction. Thus, high stress regions ofpores may be overlapped. Accordingly, when an initial crack occurs inthe high stress region, the initial crack may propagate along the firstdirection and this may decrease the function of the filter.

In addition, the initial crack may propagate along the second direction.The reason is that low stress regions between pores are closelyconnected and furthermore, they are linearly connected along the seconddirection.

Referring to FIG. 7, a result of von Mises stress simulation of thefilter having the pore arrangement according to FIG. 6 is illustrated.

The von Mises stress simulation is one of simulations to identify anoccurrence possibility of a fracture including cracks on the filtersurface. It may identify a stress level of the filter per time byapplying pressure in a three-dimensional space with a consideration offilter characteristics.

The diagram of FIG. 7 illustrates a result of a simulation in whichpressure was applied to a filter which includes silicon material and hasa length of approximately about 500 μm, a width of approximately about500 μm, and a thickness of approximately about 10 μm. The simulation wasperformed such that when a maximum force of 1 Newton per unit area wasapplied at the center of the filter with reference to a directionperpendicular to the filter, the pressure would have a Gaussiandistribution as the pressure point moves toward edges of the filter. Asame condition is presupposed for simulations to be described below.

Referring to FIG. 7, the high level of stress may occur in each porealong the first and second directions at the central portion of thefilter to which a high pressure is applied. Thus, when the initial crackoccurs, the possibility of crack propagation may be high along the firstor second direction.

FIG. 8 is a plan view of a filter according to a second comparativeembodiment. FIG. 9 is a diagram illustrating a stress simulation resultof the filter of FIG. 8.

Referring to FIGS. 8 and 9, the filter according to the secondcomparative embodiment may have the plurality of pores arranged suchthat high stress regions are close to each other. For example, thefilter according to this embodiment may have the plurality of poresarranged such that major axes are in parallel with each other along thefirst direction. In addition, the filter according to this embodimentmay have the plurality of pores arranged such that major axes are inparallel with each other along the second direction. Thus, high stressregions of respective pores may be overlapped. Accordingly, when theinitial crack occurs in the high stress region, the initial crack maypropagate along the first and second directions. In addition, since thepropagation possibility in the first and second directions is almostsame, the crack may propagate through between high stress regions. Inthis case, since the crack may two-dimensionally propagate, the functionof the filter may be relatively, more largely damaged.

Referring to FIG. 9, the high level of stress may occur along the firstand second directions of each pore at the central portion of the filterto which a high pressure is applied. In addition, unlike FIG. 8, thelevel of stress may form a circular shape, based on central points inwhich the first direction and the second direction intersect with eachother. Thus, the crack may two-dimensionally propagate on the filter.

FIG. 10 is a plan view of a filter 200 according to an embodiment. FIG.11 is a diagram illustrating a stress simulation result of the filter200 of FIG. 10.

Referring to FIGS. 10 and 11, the filter 200 may have each of theplurality of first pores 220 and each of the plurality of second pores230 alternately arranged, respectively in the first and seconddirections. For example, end portions along the major axis direction ofthe plurality of second pores 230 may face central portions of longersides of the plurality of first pores 220. For example, end portionsalong the major axis direction of the plurality of first pores 220 mayface central portions of longer sides or regions adjacent thereto of theplurality of second pores 230. For example, the plurality of first pores220 and the plurality of second pores 230 may be arranged to intersectwith each other.

The filter 200 according to the embodiment may have high stress regionsof the plurality of first pores 220 and those of the plurality of secondpores 230 arranged not to contact each other, and thus, the occurrenceprobability and the propagation probability of the crack has beenreduced.

The plurality of first pores 220 and the plurality of second pores 230may have same shapes. The plurality of first pores 220 and the pluralityof second pores 230 may have same major axis lengths (l_(wa)) and sameminor axis lengths (l_(ha)). For example, l_(wa) may be approximatelyabout 17 μm and l_(ha) may be approximately about 6 μm.

Referring to FIG. 10, with an arbitrary first pore as a center; adistance to a second pore arranged above may be d_(a1), that to a secondpore arranged below may be d_(a2), that to a second pore arranged leftmay be d_(a3), and that to a second pore arranged right may be d_(a4).For example, the plurality of first pores 220 and the plurality ofsecond pores 230 may be separated from each other at a same distance.For example, the filter 200 may satisfy a relation thatd_(a1)=d_(a2)=d_(a3)=d_(a4).

The plurality of first pores 220 and the plurality of second pores 230may be separated from each other to increase the pore density of poreswhile sufficient durability is secured. For example, the filter 200 maysatisfy a relation that d_(a1)=d_(a2)=d_(a3)=d_(a4)=approximately about5 μm.

The filter 200 according to the embodiment may have a pore density ofapproximately about 34.6%.

Referring to FIG. 11, the stress level may be high only along major axesof the first and second pores 220 and 230 at the central portion of thefilter 200 to which a high pressure is applied. The filter 200, unlikefilters according to comparative embodiments 1 and 2, may have thestress levels not connected to each other but discretely formed. Thus,the filter 200 according to the embodiment may have the occurrenceprobability and the propagation probability of the crack which isrelatively lower than that of filters according to comparativeembodiments 1 and 2.

FIG. 12 is a plan view of a filter 300 according to another embodiment.FIG. 11 is a diagram illustrating a stress simulation result of thefilter 300 of FIG. 12.

Referring to FIGS. 12 and 13, the plurality of second pores 330 may havea pair of first pores 320 respectively arranged on one side and theother side thereof along the first direction. End portions along themajor axis direction of the plurality of second pores 330 may facecentral portions of longer sides of the plurality of first pores 320.For example, the pair of first pores 320 may be arranged along the firstdirection between adjacent second pores 330.

In addition, the plurality of second pores 330 may respectively have thepair of first pores 320 arranged on one side and the other side thereofalong the second direction. For example, the pair of first pores 320 maybe arranged along the second direction between adjacent second pores330.

The filter 300 according to an embodiment may have an arrangement suchthat the high stress regions of the plurality of first pores 320 andthose of the plurality of second pores 330 are not in contact with eachother, and thus, the occurrence probability and the propagationprobability of the crack may be reduced. In addition, the pair of firstpores 320 may be arranged on each side of the plurality of second pores320 so as to enhance the pore density of the filter 300.

The plurality of first pores 320 and the plurality of second pores 330may have same shapes. The plurality of first pores 320 and the pluralityof second pores 330 may have same major axis lengths (l_(wb)) and sameminor axis lengths (l_(hb)). For example, l_(wb) may be approximatelyabout 17 μm and l_(hb) may be approximately about 6 μm. With anarbitrary second pore 330 as a basis, distances to adjacent first pores320 may be d_(b1), d_(b2), d_(b3), and d_(b4). For example, it may bepossible that d_(b1)=d_(b2)=d_(b3)=d_(b4). For example, it may bepossible that d_(b1)=d_(b2)=d_(b3)=d_(b4)=approximately about 5 μm. Thepore density of the filter 300 which satisfies such a condition may beapproximately about 39.0%.

Referring to FIGS. 12 and 13, at the central portion of the filter 300to which a high pressure is applied. The stress level may appear highonly along major axis directions of the first and second pores 320 and330. While the pore density of the filter 300 according to theembodiment may be relatively high, the stress level may be relativelyhigher than that of the filter 200 of FIG. 10 since end portions alongthe major axis directions of the first and second pores 320 and 330 arerelatively closer to each other. However, the filter 300 according tothe embodiment may still have a lower stress level than that of thefilters according to comparative embodiments 1 and 2 described above,and may still have a lower occurrence probability and propagationprobability of the crack.

FIG. 14 is a plan view of a filter 400 according to another embodiment.FIG. 15 is a diagram illustrating a stress simulation result of thefilter 400 of FIG. 14.

Referring to FIGS. 14 and 15, one first pore 420 may be arranged on eachof one sides and each of the other sides along the first direction ofthe plurality of second pores 430, and the center line along the majoraxis direction of the first pore 420 arranged on one side and the centerline along the major axis direction of the first pore 420 arranged onthe other side may be reciprocally separated from each other in thesecond direction. For example, with a second pore 431 as a reference,the first pore 421 located on one side in the first direction and afirst pore 422 located on the other side in the first direction may beseparated from each other along the second direction such that extendedlines on respective major axis directions are not overlapped with eachother.

The filter 400 according to an embodiment may have the high stressregions of the plurality of first pores 420 and those of the pluralityof second pores 430 arranged not to contact with each other, and thus,the occurrence probability and the propagation probability of cracks maybe reduced. Furthermore, a disposition, in which centerlines in themajor axis direction of respective first pore 420 are separated fromeach other in the second direction, may further reduce the propagationprobability of the crack. According to an embodiment, a case, in whichthe plurality of first pores 420 are arranged so as to have major axesof first pores 420 be separated from each other, is described as anexample; however, it is not limited thereto. For example, For example,the plurality of second pores 430 may be arranged so as to have majoraxes of second pores 430 be separated from each other.

The plurality of first pores 420 and the plurality of second pores 430may have same shapes. The plurality of first pores 420 and the pluralityof second pores 430 may have same major axis length (l_(wc)) and sameminor axis length (l_(hc)). For example, l_(wc) may be approximatelyabout 18 μm and l_(hc) may be approximately about 6 μm. With anarbitrary second pore 430 as a reference, distances to adjacent firstpore 420 may be d_(c1), d_(c2), d_(c3), and d_(c4). For example,distances may be that d_(c1)=d_(c2)=d_(c3)=d_(c4). For example, they maybe that d_(c1)=d_(c2)=d_(c3)=d_(c4)=approximately about 6 μm.

For example, the pore density of the filter 400 may be approximatelyabout 30.9%.

Referring to FIGS. 14 and 15, at the central portion of the filter 410to which a high pressure is applied, the high level of stress may appearonly along the major axis direction of the first and second pores 420and 430.

FIG. 16 is a plan view of a filter 500 according to another embodiment.FIG. 17 is a diagram illustrating a stress simulation result with regardto the filter 500 of FIG. 16.

Referring to FIGS. 16 and 17, a plurality of third pores 540 may bearranged between a plurality of first pores 520 and a plurality ofsecond pores 530. Each of the plurality of third pores 540 may have ashape approximately circular, compared with those of the plurality offirst pores 520 and the plurality of second pores 530. For example, eachof the plurality of third pores 540 may have a circular shape, a squareshape, or a rhombus shape. For example, each of the plurality of thirdpores 540 may have same lengths in first and second directions.

According to an embodiment, the filter 500 may additionally include theplurality of third pores 540 compared to the filter 100 of FIG. 10.However, the filter 500 is not limited thereto. Among variousdispositions of first and second pores 520 and 530 in which high stressregions are not overlapped each other; the pore density of the filter500 may be enhanced by adding third pores 540 into a space between firstand second pores 520 and 530.

According to an embodiment, the filter 500 may have the high stressregions of the plurality of first pores 520 and those of the pluralityof second pores 530 arranged such that stress regions do not contactwith each other, and thus, the occurrence and propagation probability ofcracks may be reduced.

The plurality of first pores 520 and the plurality of second pores 530may have a same shape. The plurality of first pores 520 and theplurality of second pores 530 may have a same major axis length (l_(wa))and a same minor axis length (l_(ha)). For example, l_(wa) may beapproximately about 18 μm and l_(ha) may be approximately about 6 μm.

Referring to FIG. 16, with an arbitrary first pore 320 as a basis,distances to adjacent second pores 330 may be d_(d1), d_(d2), d_(d3),and d_(d4). For example, the plurality of first pores 520 and theplurality of second pores 530 may be separated from each other with asame distance. For example, the filter 500 may satisfy a relation thatd_(d1)=d_(d2)=d_(d3)=d_(d4). For example, the filter 500 may satisfy arelation that d_(d1)=d_(d2)=d_(d3)=d_(d4)=approximately about 6 μm.

With an arbitrary plurality of third pores 540 as a basis, distances tothe plurality of first pores 520 and the plurality of second pores 530may be respectively d_(d5) and d_(d6) along each direction. For example,the filter 500 may satisfy a relation that d_(d5)=d_(d6). For example,the filter 500 may satisfy a relation that(d_(d5)+d_(d6))=d_(d1)=d_(d2)=d_(d3)=d_(d4). For example, the filter 500may satisfy a relation that d_(d5)=d_(d6)=approximately about 3 μm.

The filter 500 may have a pore density of approximately about 39.7%according to an embodiment.

FIG. 18 is a plan view of a filter 600 according to another embodiment.

Referring to FIG. 18, a plurality of first pores 620 and a plurality ofsecond pores 630 may be arranged in the filter 600 n such thatrespective high stress regions do not directly contact each other. Anarrangement of the plurality of first pores 620 and the plurality ofsecond pores 630 in the filter 600 may be combinations of the poresarrangements described above with regard to FIGS. 10 through 17.

FIGS. 19A and 19B are diagrams illustrating a filter structure 800according to an embodiment.

Referring to FIGS. 19A and 19B, the filter structure 800 may include afilter layer 810 and a support member 820.

The filter layer 810 may include at least one filter according toembodiments described above. The filter layer 810 may include asemiconductor material. For example, the filter layer 810 may include asilicon material.

The support member 820 may support a bottom surface of the filter layer810. The support member 820 may include an opening H10 to expose thebottom surface of the filter layer 810. For example, the support member810 may include a plastic material or a glass material.

The filter structure 800 according to this embodiment may be used as asilicon-on-glass (SOG) chip. The filter structure 800 may bemanufactured as a SOG substrate. For example, the filter structure 800may be manufactured by etching the SOG substrate in a semiconductorprocess.

FIG. 20 is a diagram of a device including a filter according toembodiments described above.

Referring to FIG. 20, the device may include a filter according toembodiments described above, an injection unit injecting the biomaterialto the filter, and a storing unit storing the biomaterial having passedthe filter. For example, the injection unit may be a syringe or acylinder. For example, the storing unit may be a tube or a cylinder. Forexample, the filter may be arranged at the bottom end of the injectionunit. For example, the filter and the support member supporting thefilter may be arranged at the bottom end of the injection unit. Theinjection unit and the storing unit may be connected with each otherthrough a tube.

The filter and the device including the filter according to anembodiment may have a high filtering efficiency. Results of testsperformed, using the filter 200 according to FIG. 11, are describedbelow.

TABLE 2 Injected Collected Collection Kind of Cells Cells Cells Rate (%)Jurkat 2.60*E5/mL 2.52*E5/mL 96.9 LNCaP 5.17*E5/mL 5.17*E5/mL 100

Referring to Table 2, the filtering efficiency of the filter 200 wastested by using a Jurkat cell, a modified cell of T lymphocyte, and anLNCaP, a prostate cancer cell, as a replacement for the white bloodcell. A diameter of the Jurkat cell is approximately about 11 μm andthat of the LNCaP cell is approximately about 14 μm. 96.9% of injectedJurkat cells were filtered and 100% of the LNCaP cells were filtered.

TABLE 3 Filtering Number of Filtered Filtering Contamination of MethodWhite Blood Cells Time Red Blood Cells Chemical 3.2*E6/mL 40 minutesHigh Solution Method of Red Blood Cell Ficoll-Paque 2.4*E6/mL 90 minutesLow Separation Method Track-etched 3.4*E6/mL 15 minutes Low MembraneFilter 3.6*E6/mL 15 minutes Low according to First Embodiment

Table 3 shows the filtering efficiency of the filter 200 in comparisonto other methods. In the case of the filter 200, the number of filteredwhite blood cells is 3.6*E6/ml, which is greater than the number ofwhite blood cells filtered via the other methods. Also, the filteringtime when the filter 200 is used is the shortest. Since the filter 200filters white blood cells with respect to a size difference of thecells, contamination caused by dissolution of red blood cells may notoccur.

The filter and the device including the filter may be used in variousareas. For example, the filter may be applied to a globule separator oran analyzer of the blood or other body fluid. For example, the filtermay be applied to the therapy in which the white blood cell isconcentrated, the number of autologous white blood cells is reproducedand used, or to an integrated device for manufacturing stem cellsthrough transformation of blood cells, etc. to the iPS cells. Forexample, the filter may be used to perform pre-processing of the redblood cell in a device for a molecular analysis on cells in the blood.For example, the filter may be applicable to a device which performs amolecular analysis such as polymerase chain reaction (PCR) afterremoving contaminated cells such as the red blood cell in a liquidbiopsy on tissue, etc. which is obtained via a fine needle aspiration,etc. For example, the filter may be used in a concentration process ofcells in a limited space such as an intensive care unit in a hospital, amobile medical chamber, a bloodmobile, etc. in which an infectionpossibility due to external germs, etc. needs to be minimized.

It should be understood that the embodiments described herein should beconsidered in a descriptive sense only and not for purposes oflimitation. Descriptions of features or aspects within each embodimentshould typically be considered as available for other similar featuresor aspects in other embodiments.

While one or more embodiments have been described with reference to thefigures, it will be understood by those of ordinary skill in the artthat various changes in form and details may be made therein withoutdeparting from the spirit and scope as defined by the following claims.

We claim:
 1. A filter comprising a rigid plate comprising asemiconductor material, the plate comprising a plurality of poresarranged two-dimensionally to filter a biomaterial, wherein theplurality of pores comprises: a plurality of first pores extending in afirst direction and having a relatively longer structure in the firstdirection than in a direction perpendicular to the first direction; anda plurality of second pores having a relatively long structure in asecond direction different from the first direction, wherein an endportion along a major axis direction of the second pores faces a centralportion on a longer side of the first pores;
 2. The filter of claim 1,wherein the first and second pores are respectively alternately arrangedin the first and second directions.
 3. The filter of claim 1, whereinthe end portion along the major axis direction of the first pores facesthe central portion of the longer side of the second pores or an areaadjacent thereto.
 4. The filter of claim 1, wherein pairs of some of thefirst pores are respectively arranged in the first direction with asecond pore in between each two pairs, the second pore being aligned inthe first direction, and pairs of some of the first pores arerespectively arranged in the second direction with the second pore inbetween each two pairs.
 5. The filter of claim 1, wherein some of thefirst pores are respectively arranged in the first direction with asecond pore in between each two of the first pores, the second porebeing aligned in the first direction, and some of the first pores arerespectively misaligned so that major axis directions of the first poresare separated along the second direction.
 6. The filter of claim 1,wherein the plurality of pores further comprises a plurality of thirdpores between the plurality of first pores and the plurality of secondpores.
 7. The filter of claim 6, wherein the third pores have samelength in the first and second directions.
 8. The filter of claim 1,wherein the plurality of pores are separated by uniform gaps in thefirst and second directions.
 9. The filter of claim 1, wherein each ofthe first and second pores has an elliptical shape.
 10. The filter ofclaim 1, wherein the ratio of the length in the major axis direction tothe length in the minor axis direction of each of the first and secondpores is greater than or equal to about 2.5.
 11. The filter of claim 1,wherein a length of each of the first and second pores along the majoraxis is about 10 μm to about 20 μm, and a lengths of each of the firstand second pores along the minor axis direction is about 4 μm to about 7μm.
 12. The filter of claim 1, wherein a shortest distance between thefirst pores and the second pores is 4 μm to about 7 μm.
 13. The filterof claim 1, wherein the ratio of an area of the plurality of pores to anarea of the filter is greater than or equal to 30%.
 14. The filter ofclaim 1, wherein the biomaterial comprises blood, and the first andsecond pores are configured to allow red blood cells in the blood topass therethrough but not to allow white blood cells in the blood topass therethrough.
 15. The filter of claim 1, wherein a support memberis on a bottom surface of the filter to support the filter and comprisesat least one opening exposing the bottom surface of the filter.
 16. Afilter comprising a rigid plate comprising a semiconductor material, theplate comprising a plurality of pores arranged two-dimensionally tofilter a biomaterial, wherein the plurality of pores comprise: aplurality of first pores extending in a first direction and having arelatively longer structure in the first direction than in a directionperpendicular to the first direction; and a plurality of second poreshaving a relatively long structure in a second direction different fromthe first direction, wherein the first and second pores are respectivelyalternately arranged in the first and second directions.
 17. The filterof claim 16, wherein an end portion along a major axis direction of thefirst pores faces a central portion of a longer side of the secondpores, and/or the end portion along the major axis direction of thesecond pores faces the central portion of the longer side of the firstpores.
 18. A device comprising: the filter of claim 1; an injection unitinjecting the biomaterial into the filter; and a storing unit storingthe biomaterial that passed through the filter.